Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors
نویسندگان
چکیده
منابع مشابه
Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors
This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity...
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ژورنال
عنوان ژورنال: Sensors
سال: 2012
ISSN: 1424-8220
DOI: 10.3390/s120810034